Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054754 | Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger | — | 2018-08-21 |
| 9976930 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2018-05-22 |
| 9977350 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2018-05-22 |