MK

Michael P. Kanouff

KL Kla-Tencor: 2 patents #62 of 353Top 20%
Overall (2018): #119,449 of 503,207Top 25%
2
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10101664 Apparatus and methods for optics protection from debris in plasma-based light source Alexey Kuritsyn, Ye Liu, Oleg Khodykin 2018-10-16
10034362 Plasma-based light source Alexey Kuritsyn, Alexander N. Bykanov, Oleg Khodykin 2018-07-24