Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101664 | Apparatus and methods for optics protection from debris in plasma-based light source | Ye Liu, Oleg Khodykin, Michael P. Kanouff | 2018-10-16 |
| 10034362 | Plasma-based light source | Alexander N. Bykanov, Michael P. Kanouff, Oleg Khodykin | 2018-07-24 |
| 10021773 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Brian Ahr, Rudy F. Garcia, Frank Chilese, Oleg Khodykin | 2018-07-10 |
| 9989758 | Debris protection system for reflective optic utilizing gas flow | Alexander N. Bykanov, Oleg Khodykin | 2018-06-05 |
| 9918375 | Plasma based light source having a target material coated on a cylindrically-symmetric element | Ye Liu, Oleg Khodykin | 2018-03-13 |