Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905449 | Electrostatic chuck | Kazuki Anada, Tatsuya Koga, Hiroki Matsui | 2018-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905449 | Electrostatic chuck | Kazuki Anada, Tatsuya Koga, Hiroki Matsui | 2018-02-27 |