Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960067 | Electrostatic chuck | Yuichi Yoshii | 2018-05-01 |
| 9905449 | Electrostatic chuck | Kosuke Yamaguchi, Tatsuya Koga, Hiroki Matsui | 2018-02-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960067 | Electrostatic chuck | Yuichi Yoshii | 2018-05-01 |
| 9905449 | Electrostatic chuck | Kosuke Yamaguchi, Tatsuya Koga, Hiroki Matsui | 2018-02-27 |