Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062575 | Poly directional etch by oxidation | Tom Choi, Sean S. Kang | 2018-08-28 |
| 10026621 | SiN spacer profile patterning | Tom Choi, Nitin K. Ingle, Kwang Soo Kim, Theodore Wou | 2018-07-17 |