Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138565 | High-throughput batch porous silicon manufacturing equipment design and processing methods | Takao Yonehara, Subramanian Tamilmani, Karl-Josef Kramer, Mehrdad M. Moslehi, Yasuyoshi Miyaji +2 more | 2018-11-27 |
| 9890465 | Apparatus and methods for uniformly forming porous semiconductor on a substrate | Karl-Josef Kramer, Mehrdad M. Moslehi, Subramanian Tamilmani, George D. Kamian, Takao Yonehara | 2018-02-13 |
| 9870937 | High productivity deposition reactor comprising a gas flow chamber having a tapered gas flow space | Mehrdad M. Moslehi, Karl-Josef Kramer, George D. Kamian, David Mordo, Takao Yonehara | 2018-01-16 |