Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109508 | Substrate processing device and method of manufacturing semiconductor device | Katsuhiro Sato | 2018-10-23 |
| 10090351 | Semiconductor device having gaps within the conductive parts | Kazumasa Tanida | 2018-10-02 |