Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119925 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2018-11-06 |
| 10082390 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2018-09-25 |
| 9952166 | Silicon germanium thickness and composition determination using combined XPS and XRF technologies | Wei Ti Lee | 2018-04-24 |