Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119925 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2018-11-06 |
| 10056242 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | Bruno W. Schueler, Bruce H. Newcome, Rodney Smedt, Chris Bevis | 2018-08-21 |