Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088438 | Method and system for inspecting an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2018-10-02 |
| 9859089 | Method and system for inspecting and grounding an EUV mask | Youjin Wang, Chiyan Kuan, Chung-Shih Pan | 2018-01-02 |