Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088438 | Method and system for inspecting an EUV mask | Guochong Weng, Youjin Wang, Chung-Shih Pan | 2018-10-02 |
| 10054556 | Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask | You-Jin Wang, Chung-Shih Pan | 2018-08-21 |
| 9859089 | Method and system for inspecting and grounding an EUV mask | Guochong Weng, Youjin Wang, Chung-Shih Pan | 2018-01-02 |