ES

Eugene Shifrin

KL Kla-Tencor: 1 patents #130 of 353Top 40%
Overall (2018): #423,199 of 503,207Top 85%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2018-03-27