Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103073 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Ingemar Carlsson +2 more | 2018-10-16 |
| 9886026 | Endpoint method using peak location of spectra contour plots versus time | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek | 2018-02-06 |