Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10105811 | Eddy current system having an elongated core for in-situ profile measurement | G. Laurie Miller, Manoocher Birang | 2018-10-23 |
| 10103073 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2018-10-16 |
| 10086492 | Applying dimensional reduction to spectral data from polishing substrates | Jeffrey Drue David, Benjamin Cherian | 2018-10-02 |
| 10012494 | Grouping spectral data from polishing substrates | Jeffrey Drue David | 2018-07-03 |
| 9911664 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Wen-Chiang Tu, Zhefu Wang, Hassan G. Iravani +2 more | 2018-03-06 |
| 9886026 | Endpoint method using peak location of spectra contour plots versus time | Jeffrey Drue David, Harry Q. Lee, Dominic J. Benvegnu | 2018-02-06 |