Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2018-02-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2018-02-06 |