Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109476 | Substrate processing method for depositing a barrier layer to prevent photoresist poisoning | Ilia Kalinovski | 2018-10-23 |
| 9941108 | High dose implantation strip (HDIS) in H2 base chemistry | Haruhiro Harry Goto | 2018-04-10 |