Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047438 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Kareem Boumatar, Christopher Ramsayer | 2018-08-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047438 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Kareem Boumatar, Christopher Ramsayer | 2018-08-14 |