Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115617 | System architecture for vacuum processing | Vinay Shah, Alexandru Riposan | 2018-10-30 |
| 10106883 | Sputtering system and method using direction-dependent scan speed or power | Vinay Shah, Alexandru Riposan, Vladimir Kudriavtsev | 2018-10-23 |
| 10062600 | System and method for bi-facial processing of substrates | Vinay Shah, Ian Latchford, Alexandru Riposan | 2018-08-28 |
| 9914994 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more | 2018-03-13 |
| 9892890 | Narrow source for physical vapor deposition processing | Alex Riposan | 2018-02-13 |
| 9875922 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Babak Adibi | 2018-01-23 |