Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115617 | System architecture for vacuum processing | Terry Bluck, Vinay Shah | 2018-10-30 |
| 10106883 | Sputtering system and method using direction-dependent scan speed or power | Vinay Shah, Terry Bluck, Vladimir Kudriavtsev | 2018-10-23 |
| 10062600 | System and method for bi-facial processing of substrates | Terry Bluck, Vinay Shah, Ian Latchford | 2018-08-28 |