Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109583 | Method for creating alternate hardmask cap interconnect structure with increased overlay margin | Manish Chandhok, Jasmeet S. Chawla, Florian Gstrein, Eungnak Han, Rami Hourani +3 more | 2018-10-23 |
| 9932671 | Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) | James M. Blackwell, Patricio E. Romero, Scott B. Clendenning, Grant Kloster, Florian Gstrein +2 more | 2018-04-03 |