Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10093537 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2018-10-09 |
| 9890039 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2018-02-13 |
| 9862598 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Jeffrey C. Maling, Anthony K. Stamper | 2018-01-09 |