Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10093537 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Anthony K. Stamper | 2018-10-09 |
| 10081534 | Semiconductor structures provided within a cavity and related design structures | Anthony K. Stamper, Dana DeReus, Arthur S. Morris, III | 2018-09-25 |
| 9981842 | Micro-Electro-Mechanical System (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, William J. Murphy, Anthony K. Stamper +1 more | 2018-05-29 |
| 9969613 | Method for forming micro-electro-mechanical system (MEMS) beam structure | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, William J. Murphy, Anthony K. Stamper +1 more | 2018-05-15 |
| 9938137 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, William J. Murphy, Anthony K. Stamper +1 more | 2018-04-10 |
| 9932222 | Micro-electro-mechanical system (MEMS) structures and design structures | Michael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, William J. Murphy, Anthony K. Stamper +1 more | 2018-04-03 |
| 9890039 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Anthony K. Stamper | 2018-02-13 |
| 9862598 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Anthony K. Stamper | 2018-01-09 |