Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012898 | EUV mask for monitoring focus in EUV lithography | Timothy A. Brunner | 2018-07-03 |
| 9921466 | Method for monitoring focus in EUV lithography | Timothy A. Brunner | 2018-03-20 |