Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881793 | Neutral hard mask and its application to graphoepitaxy-based directed self-assembly (DSA) patterning | Sebastian U. Engelmann, Deborah A. Neumayer, John M. Papalia, HsinYu Tsai | 2018-01-30 |