Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042973 | Expansion of allowed design rule space by waiving benign geometries | Dmitry Vengertsev | 2018-08-07 |
| 9928316 | Process-metrology reproducibility bands for lithographic photomasks | Todd C. Bailey, Scott D. Halle, Marshal A. Miller | 2018-03-27 |
| 9904757 | Test patterns for determining sizing and spacing of sub-resolution assist features (SRAFs) | Amr Y. Abdo | 2018-02-27 |