Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026607 | Substrate processing apparatus for forming film including at least two different elements | Hajime Karasawa, Yoshiro Hirose | 2018-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026607 | Substrate processing apparatus for forming film including at least two different elements | Hajime Karasawa, Yoshiro Hirose | 2018-07-17 |