Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032630 | Method of manufacturing semiconductor device | Katsuhiko Yamamoto, Kazuyuki Toyoda | 2018-07-24 |
| 10026607 | Substrate processing apparatus for forming film including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2018-07-17 |