Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128141 | Plasma processing apparatus and plasma processing method | Go Miya, Masaru Izawa, Hiromichi Kawasaki | 2018-11-13 |
| 10103007 | Plasma processing apparatus with gas feed and evacuation conduit | Akitaka Makino | 2018-10-16 |