Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128141 | Plasma processing apparatus and plasma processing method | Takumi Tandou, Go Miya, Masaru Izawa | 2018-11-13 |
| D831085 | Substrate processing unit | Yusaku Sakka | 2018-10-16 |
| D831086 | Substrate processing unit | Yusaku Sakka | 2018-10-16 |