Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997337 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoshi Itabashi | 2018-06-12 |
| 9960014 | Plasma etching method | Ken'etsu Yokogawa, Nobuyuki Negishi, Masami Kamibayashi, Masatoshi Miyake | 2018-05-01 |
| 9933553 | Optical element and optical device | Koji Hirata, Hiroyuki Minemura, Yumiko Anzai, Tetsuya Nishida, Jiro Yamamoto +2 more | 2018-04-03 |