Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031083 | Fixed position controller and method | Michiru FUJIOKA, Tsuyoshi Sonehara | 2018-07-24 |
| 9997337 | Plasma processing method and plasma processing apparatus | Masahito Mori, Naoyuki Kofuji | 2018-06-12 |