MS

Mitsugu Sato

HH Hitachi High-Technologies: 1 patents #105 of 409Top 30%
Overall (2018): #300,087 of 503,207Top 60%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10020163 Charged particle beam apparatus, specimen observation system and operation program Yayoi Konishi, Masaki Takano, Shotaro Tamayama, Masako Nishimura, Shunya Watanabe +1 more 2018-07-10