Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984933 | Silicon liner for STI CMP stop in FinFET | Yiheng Xu, Haiting Wang, Wei Zhao, Jiehui Shu, Jinping Liu +1 more | 2018-05-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984933 | Silicon liner for STI CMP stop in FinFET | Yiheng Xu, Haiting Wang, Wei Zhao, Jiehui Shu, Jinping Liu +1 more | 2018-05-29 |