Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966315 | Advanced process control methods for process-aware dimension targeting | Philipp Jaschinsky, Frank Kahlenberg, Roberto Schiwon, Rolf Seltmann | 2018-05-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966315 | Advanced process control methods for process-aware dimension targeting | Philipp Jaschinsky, Frank Kahlenberg, Roberto Schiwon, Rolf Seltmann | 2018-05-08 |