Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9966315 | Advanced process control methods for process-aware dimension targeting | Philipp Jaschinsky, Frank Kahlenberg, Sirko Kramp, Roberto Schiwon | 2018-05-08 | $5,480,000 |