Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146132 | Mobile dispense device for chemicals used in micro-processing | Wolfram Grundke, Heiko Wagner | 2018-12-04 |
| 10007198 | Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track | Heiko Wagner | 2018-06-26 |