Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10146132 | Mobile dispense device for chemicals used in micro-processing | Sidheswara Mahapatra, Wolfram Grundke | 2018-12-04 | $15,683,000 |
| 10007198 | Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track | Sidheswara Mahapatra | 2018-06-26 | $10,847,000 |