Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126651 | Pattern forming method, and, method for producing electronic device and electronic device, each using the same | Shinichi Sugiyama, Ryosuke Ueba, Makoto Momota | 2018-11-13 |
| 10088752 | Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device | Takashi Kawamoto, Naoya IGUCHI | 2018-10-02 |
| 9885956 | Pattern forming method, and, electronic device producing method and electronic device, each using the same | Naoya IGUCHI, Ryosuke Ueba, Kei Yamamoto | 2018-02-06 |