Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088752 | Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device | Tsukasa Yamanaka, Takashi Kawamoto | 2018-10-02 |
| 9885956 | Pattern forming method, and, electronic device producing method and electronic device, each using the same | Tsukasa Yamanaka, Ryosuke Ueba, Kei Yamamoto | 2018-02-06 |