Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101222 | Piezoelectric position sensor for piezoelectrically driven resonant micromirrors | Hans-Joachim Quenzer, Joachim Janes, Felix Heinrich | 2018-10-16 |
| 10095023 | Apparatus comprising a spring and an optical element suspended thereon | Dirk KADEN, Christian Eisermann | 2018-10-09 |