Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101222 | Piezoelectric position sensor for piezoelectrically driven resonant micromirrors | Shanshan GU-STOPPEL, Joachim Janes, Felix Heinrich | 2018-10-16 |
| 9910273 | Method for producing structured optical components | Ulrich Hofmann, Vanessa Stenchly | 2018-03-06 |
| 9912115 | Method of producing a cap substrate, and packaged radiation-emitting device | Wolfgang Reinert | 2018-03-06 |