Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953850 | Substrate processing apparatus including heat-shield plate | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-23 |
| 9869019 | Substrate processing apparatus including processing unit | Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-16 |