Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161036 | Substrate processing apparatus | Jun Jin Hyon, Sung Tae Je, Yong-Ki Kim, Kyoung-Hun Kim, Chang Dol KIM +2 more | 2018-12-25 |
| 9953850 | Substrate processing apparatus including heat-shield plate | Il-Kwang Yang, Sung Tae Je, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-04-24 |
| 9875895 | Substrate processing apparatus including exhaust ports and substrate processing method | Il-Kwang Yang, Sung Tae Je, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-23 |
| 9869019 | Substrate processing apparatus including processing unit | Il-Kwang Yang, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2018-01-16 |