Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10099340 | Polishing apparatus including pad contact member with baffle in liquid flow path therein | — | 2018-10-16 |
| 10035238 | Polishing method and polishing apparatus | Toru Maruyama, Hisanori Matsuo | 2018-07-31 |
| 9969046 | Method and apparatus for polishing a substrate | Toru Maruyama, Hisanori Matsuo | 2018-05-15 |