Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035238 | Polishing method and polishing apparatus | Toru Maruyama, Yasuyuki Motoshima | 2018-07-31 |
| 9969046 | Method and apparatus for polishing a substrate | Yasuyuki Motoshima, Toru Maruyama | 2018-05-15 |