Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982177 | Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same | Tomohiro Iwano, Hirotaka Akimoto, Takenori Narita, Daisuke Ryuzaki | 2018-05-29 |