Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011553 | Method for producing dry etching gas | Shingo Nakamura, Tatsuya Ohtsuka, Kanako FUKUMOTO, Masato Naitou | 2018-07-03 |
| 9988328 | Method for producing fluorinated methane | Shingo Nakamura | 2018-06-05 |
| 9919990 | Method for manufacturing methyl fluoride | Shingo Nakamura, Kanako FUKUMOTO, Tatsuya Ohtsuka, Masahiro Higashi | 2018-03-20 |