Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011553 | Method for producing dry etching gas | Shingo Nakamura, Yuusuke ETOU, Tatsuya Ohtsuka, Kanako FUKUMOTO | 2018-07-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011553 | Method for producing dry etching gas | Shingo Nakamura, Yuusuke ETOU, Tatsuya Ohtsuka, Kanako FUKUMOTO | 2018-07-03 |