Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101648 | Method and system for forming a pattern on a reticle using charged particle beam lithography | — | 2018-10-16 |
| 10031413 | Method and system for forming patterns using charged particle beam lithography | Anatoly Aadamov, Eldar Khaliullin, Ingo Bork | 2018-07-24 |
| 9859100 | Method and system for dimensional uniformity using charged particle beam lithography | Kazuyuki Hagiwara, Robert C. Pack | 2018-01-02 |